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Trace Gas Measurement Sytems from Neoplascontrol 

Q-MACS Trace Gas Analysis

Neoplascontrol produces MIR absorption spectroscopy systems incorporating Quantum Cascade Lasers for trace gas measurments to the ppb range. These systems are offered with various path length cells and are complete including software. 

Insitu Monitoring of Silicon Plasma Etching

Application of mid-infrared tuneable diode laser absorption spectroscopy to plasma diagnostics:a review